Schneider, M., & Schmid, U. (2024). How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonators. In S. Schmid (Ed.), 19th International Workshop on Nanomechanical Sensing (pp. 112–112).
19th International Workshop on Nanomechanical Sensing
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Date (published):
24-Jun-2024
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Event name:
19th International Workshop on Nanomechanical Sensing
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Event date:
24-Jun-2024 - 27-Jun-2024
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Event place:
Austria
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Number of Pages:
1
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Keywords:
Q-factor; measurements; PiezoMEMS resonators
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Abstract:
Piezoelectric silicon MEMS resonators based on aluminum nitride (AlN) thin films are a versatile
technology platform for a multitude of sensor applications [1,2]. Given the moderate piezoelectric
coefficients of AlN and thus low stroke levels, such devices are commonly designed for resonant
operation [3]. Resonances in linear devices are characterized by two quantities, resonance frequency
𝑓! and quality factor 𝑄. In this work, we examine the impact of bandwidth and number of samples
points within a given frequency range on the precision, by which 𝑄 can be measured.
